Published in Healthcare Finance, Tax and Law Weekly, September 23rd, 2009
Specifically, LAM Research alleged at the beginning of the case in January 2009 that AMEC's Primo D-RIE™ dielectric etch system infringes its TW Patent 136706 "Perforated Plasma Confinement Ring in Plasma Reactors", and TW Patent 126873 "Focus Ring Arrangement for Substantially Eliminating...
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