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Imaging Technology
New sensor bares faults in smallest possible, most advanced circuits
June 2nd, 2003
A new scanning microscope developed at Brown University can uncover defects in the smallest and most complex integrated circuits at a resolution 1,000 times greater than current technology. The scanner removes a barrier to further shrinking of integrated circuits: as circuits get smaller, non-visual defects become harder to find. "This microscope will allow manufacturers to find defects in each embedded wire in ever-tinier circuits," said Prof. Gang Xiao. He developed the instrument's hardware and software with Ben Schrag, who received his PhD at Brown in May 2003. The microscope's magnetic-scanning technology suggests a new...
Source: Science Letter (2003-06-02)
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